Relative positioning control of flexible structure for precise positioning stage
نویسندگان
چکیده
منابع مشابه
Control of Impact Microactuators for Precise Positioning
Electrically driven impact microactuators generate nanoscale displacements without large driving distances and high voltages. These systems exhibit complex dynamics because of inherent nonlinearities due to impacts, friction, and electric forces. As a result, dramatic changes in system behavior, associated with socalled grazing bifurcations, may occur during the transition between impacting and...
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ژورنال
عنوان ژورنال: Mechanical Engineering Journal
سال: 2020
ISSN: 2187-9745
DOI: 10.1299/mej.19-00443